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  • 【Overview】

    Semiconductors, integrated circuit chip and packaging, LCD, high-precision circuit board, photoelectric devices, various electronic devices, micro-electronics industry, large-scale, ultra-large scale integrated circuits requires large amounts of high water, ultrapure water to wash semi-finished and finished products. The higher integration of integrated circuits, the more narrow width, the higher the water quality requirements。(General requirements for ultra-pure water resistivity 18.2MΩ.cm (25 ℃), TOC <5ppb, Bacterial Endotoxin <0.03EU/ml) that the electronics industry pure water, ultrapure water treatment system, ease of use of technology and its products Degree of automation, continuity, sustainability made more stringent requirements.

    【National standards】（GB/T11446.1-1997）

    At present, China Ministry of Electronics Industry of the electronic water-level is divided into five industry standard technology, namely 18MΩ.cm, 15MΩ.cm, 10MΩ.cm, 2MΩ.cm, 0.5MΩ.cm, to distinguish between different water quality。

    China National Electronics Ultra pure water specifications GB/T11446.1-1997

     

    Resistivity

    25℃
    MΩ*cm

    Si≤μg/L

    Co≤μg/L

    Zi≤μg/L

    Ni
    ≤μg/L

    Na≤μg/L

    K≤μg/L

    Cl≤μg/L

    >1μm

    Particles

    ≤个/ml

    Bacteria

    ≤个/ml

    Nitrate
    ≤g/L

    Phosphate
    ≤μg/L

    Sulfate
    ≤μg/L

    TOC
    ≤μg/L

    EW-I

    ≥18*

    2

    0.2

    0.2

    0.1

    0.5

    0.5

    1

    0.1

    0.01

    1

    1

    1

    20

    EW-II

    ≥15 **

    10

    0

    0

    1

    2

    2

    1

    5

    0.1

    1

    1

    1

    100
    Note * (95% of the time is not less than 17 ),**( 95% of the time is not less than 13)
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